I assume you've given everything a good once over? The corrugated plastic and rubber intake hoses and boots like to crack on the corrugations, it can be very difficult to see without removing and flexing the part.
But I'm still voting on the MAF. 
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‘07 Mazda RX8
Past: 911T, 911SC, Carrera, 951s, 955, 996s, 987s, 986s, 997s, BMW 5x, C36, C63, XJR, S8, Maserati Coupe, GT500, etc
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